RF Plasma Equipment parad Semiconductor Applications
Say RF Plasma Equipment parad Semiconductor Applications et sakey ya espisyal ya yunit na panaglinis ya ginawa parad saray advanced ya proseso na panagbalot na semiconductor tan panagtambal ed tapew. Say kagawaan et walaan na malet ya kabinet ya gawad atagey-grade ya asero, ya asumpal ed wrinkle-texture ya powder coating ya amputi, ya mangiiter na parehon inkadukey tan malinis ya itsura ed industriya.
Deskripsion na saray produkto
Say RF Plasma Equipment parad Semiconductor Applications et sakey ya espisyal ya yunit na panaglinis ya ginawa parad saray advanced ya proseso na panagbalot na semiconductor tan panagtambal ed tapew. Say kagawaan et walaan na malet ya kabinet ya gawad atagey-grade ya asero, ya asumpal ed wrinkle-texture ya powder coating ya amputi, ya mangiiter na parehon inkadukey tan malinis ya itsura ed industriya. Say manunan vacuum chamber to et ginawa manlapud atagey-purity ya aluminum plates ya ag-onkulang ed 25 mm so kapal to, ya mangiseguro na ekselentin panag-seal tan andukey a panaon ya inkapekder na istruktura. Say sukat na loob na silir et 450 × 450 × 450 mm, ya walaan na kompleton akasara ya sakey-piece electrode plate ya mansukat na 410 × 430 mm. Saray work basket et direktan iiyan ed plato na electrode, ya onkokonekta ed copper electrode base panamegley na plug-in ya desinyo, ya mangigarantiya na epektibo tan malet ya pakawalaan na plasma legan na operasyon.
Say sistema et kokontrolen na PLC platform, ya mangiiter na ag-onkulang ya pananguman ed baetan na manual tan fully automatic iran mode. Amin ya operating parameters et nayarin i-configure, i-adjust, isimpen, tan i-monitor ed mismon panaon. Say integrated PID control loop et lalon mamaaligwas ed inkapekder tan inkasusto. Saray nanduruman proseso na resipe et nayarin i-save tan i-recall no nakaukolan, ya talagan mausar ed saray kaliberliber ya mankaukolan na mabetbet ya pananguman ed proseso. Say vacuum system et papaandaren na dry pump set, ya mangiiter na maples ya kapeles na panagbomba, ya say chamber et kaslakan ya makasabi ed nakaukolan ya vacuum level ed loob na 100 segundo.
Saray manunan teknikal ya detalye et kaiba so plasma frequency ya 13.56 MHz, ya say RF power et tuloytuloy ya na-adjust manlapud 0 anggad 600 W. Say manunan power supply et 380 V AC (±10%), 50/60 Hz, three-phase five-wire system, tan say dagup ya power consumption na kagawaan et mas abeba nen say 3 kW. Say iyaagus na gas et nayarin eksakton naregula ed baetan na 0 anggad 200 ml/min pian nasuportaan so nanduruman pankaukolan na proseso.
No nipaakar ed aplikasyon, say kagawaan et walay importantin betang to ed panagbalot na semiconductor, lalo la antis na wire bonding (W/B). Say panaglinis na plasma et epektibon mangekal na saray organikon residue ed saray chip pad, mamaandar ed tapew, tan mamaaligwas ed inkabasa. Lapud saya, say bond wire adhesion et napaaligwas, say bond strength et ondarakel, tan say peligro na detachment et baleg ya nabawasan. Susuportaan na sistema so multilayer processing tan cassette-style loading, ya mangiiter na pankanawnawa ed saray manggagawa na kagawaan ya iyadapta so kagawaan ed nanduruman sukat tan pankaukolan na produksyon.
Lapud mabiskeg so desinyo na silir, eksakton kontrol, tan nababalang ya proseso, sayan RF plasma equipment et mangiyoopresi na napanmatalkan tan epektibon solusyon pian nadampot so atagey-kalidad, naulit-ulit ya resulta na panagtambal ed tapew diad panaggawa na semiconductor.
Saray Mainit ya Tag: rf plasma equipment for semiconductor applications, China rf plasma equipment for semiconductor applications manufacturers, factory
Ipawit so Pantepet
